• EBeam Home
• News
• Remote Work
• Training
• Documentation
  • Overview
  • Safety
  • CAD
  • PatternPrep
    • Getting Started
    • File Names & Dirs
    • File Transfer: EBSEND
    • Fracturing
    • Bias
    • Bordering or Sleeving
    • Field Placement
    • Dose: Manual
    • Dose: Auto via Filter
    • JBXFiler
    • Proximity Correction
      • Example
      • JDI file
      • MODMOD
    • Beamer Manual
    • Beamer Videos
    • Beamer Release Notes
    • JEOL Appl Note
    • Beamer Versions
  • JobFiles
  • Exposure
  • Alignment
  • JEOL Documentation
  • Operation
• Process
• Reference
• Site Index
• Site Map
• Website Updates

The Dose Information - .jdi File

As described above, the .v30 file does not contain actual dose settings, it only contains integer indices. The actual dose values are exported in a separate file for including in the Job Deck, named the same as your pattern but with the file extension ".jdi" (Job Deck Include).

Here's an example JDI file:

MOD001: MODULAT (( 0, -25.9 ) , ( 1, -25.2 ) , ( 2, -24.5 )
-     , ( 3, -23.7 ) , ( 4, -23.0 ) , ( 5, -22.2 )
-     , ( 6, -21.4 ) , ( 7, -20.7 ) , ( 8, -19.9 )
-     , ( 9, -19.1 ) , ( 10, -18.3 ) , ( 11, -17.5 )
-     , ( 12, -16.7 ) , ( 13, -15.8 ) , ( 14, -15.0 )
-     , ( 15, -14.2 ) , ( 16, -13.3 ) , ( 17, -12.4 )
-     , ( 18, -11.6 ) , ( 19, -10.7 ) , ( 20, -9.8 )
-     , ( 21, -8.9 ) , ( 22, -8.0 ) , ( 23, -7.1 )
-     , ( 24, -6.2 ) , ( 25, -5.3 ) , ( 26, -4.3 )
-     , ( 27, -3.4 ) , ( 28, -2.4 ) , ( 29, -1.5 )
-     , ( 30, -0.5 ) , ( 31,  0.5 ) , ( 32,  1.5 )
-     , ( 33,  2.5 ) , ( 34,  3.5 ) , ( 35,  4.5 )
-     , ( 36,  5.6 ) , ( 37,  6.6 ) , ( 38,  7.7 )
-     , ( 39,  8.7 ) , ( 40,  9.8 ) , ( 41, 10.9 )
-     , ( 42, 12.0 ) , ( 43, 13.1 ) , ( 44, 14.2 )
-     , ( 45, 15.3 ) , ( 46, 16.5 ) , ( 47, 17.6 )
-     , ( 48, 18.8 ) , ( 49, 20.0 ) , ( 50, 21.2 )
-     , ( 51, 22.4 ) , ( 52, 23.6 ) , ( 53, 24.8 )
-     , ( 54, 26.0 ) , ( 55, 27.3 ) , ( 56, 28.5 )
-     , ( 57, 29.8 ) , ( 58, 31.1 ) , ( 59, 32.4 )
-     , ( 60, 33.7 ) , ( 61, 35.0 ) , ( 62, 36.3 )
-     , ( 63, 37.7 ) , ( 64, 39.1 ) , ( 65, 40.4 )
-     , ( 66, 41.8 ) , ( 67, 43.2 ) , ( 68, 44.6 )
-     , ( 69, 46.1 ) , ( 70, 47.5 ) , ( 71, 49.0 )
-     , ( 72, 50.5 ) , ( 73, 51.9 ) , ( 74, 53.4 )
-     , ( 75, 55.0 ) , ( 76, 56.5 ) , ( 77, 58.0 )
-     , ( 78, 59.6 ) , ( 79, 61.2 ) , ( 80, 62.8 )
-     , ( 81, 64.4 ) , ( 82, 66.0 ) , ( 83, 67.7 )
-     , ( 84, 69.3 ) , ( 85, 71.0 ) , ( 86, 72.7 )
-     , ( 87, 74.4 ) , ( 88, 76.1 ) , ( 89, 77.9 )
-     , ( 90, 79.6 ))

From this file, you can see the familiar MODULAT command you would include in your JDF file, in the form of a Shot Modulation Table, in this case, named MOD001. This is the default name, and LayoutBEAMER always names its modulation tables this. If you are using only one pattern, then there is no problem, but if you have more than one pattern to expose in a single job, you will need to rename tables manually to avoid duplication of the same name.


You have two options with this .jdi file. You can cut-and-paste the Modulation table directly into your .JDF file, or you can copy this .jdi file to the same directory as your JDF file and the "include" this file into your Job Deck with the include syntax:

	@'resotest3_pc1.jdi'

Be careful to note that you must copy the Pattern file into the correct PATTERN subdirectory, while the corresponding JDI file must be copied into the same JOB subdirectory as your .SDF and .JDF files.

Exposing a Pattern with Proximity Correction

When exposing a file using Proximity Correction the setup and pattern placement commands are identical to any other pattern. The primary key is that you have to define the Shot Modulation table in your .jdi file to the correct pattern. Note that LayoutBEAMER will always name its Shot Modulation table MOD001. If you have only one proximity-corrected file in you job, this is fine. It you have more than one file, you will need to rename one or more of the Shot Modulation tables to avoid a conflict.

Base Dose

When exposing a proximity file, the dose correction in the file is all relative some some "Base Dose". The Base Dose is approximately the clearing dose in the middle of a large (> 2 * β) shape. Note this is typically a lower dose than you would use for an uncorrected exposure, because without correction we usually overexpose in the middle of shapes to ensure that the edges and corners of shapes end up properly exposed.

How do you know what base dose to use? You can usually get a good guess from prior experience with the resist/developer/substrate combination, but typically you still end up needing to do an Exposure Matrix where you vary the Base Dose and inspect or measure to find the optimum Base Dose to use.

MODMOD

Unfortunately, in the JEOL Job Deck language, it is not very straightforward to do a dose matrix of a proximity-corrected pattern. I've written a utility called MODMOD to help make the process a bit more simple.