CAD Overview
Before you can write any ebeam pattern, you’ll need one or more pattern files. There are a couple of different options available for creating pattern files, and a couple of options that you should avoid if at all possible. The best option for you to choose will depend on several factors, including the type of pattern file you wish to create (size, complexity, repeating structures, etc), any existing CAD that you may already have, any existing CAD systems you might already have, etc. I strongly recommend that you discuss your options with me BEFORE you start work. I’d hate to have you invest a lot of effort only to find that your pattern file cannot be used.
Before you make any choices, you should read a discussion of CAD file formats and CAD programs available. That page describes a freeware CAD program that works pretty well, called KLAYOUT. I’ve created a more detailed Tutorial on how to design a layout using KLayout.
A more powerful alternative to KLayout is a commercial CAD package LayoutEditor. The UW-WNF has purchased a site license for LayoutEditor, which can be used by UW Faculty, Students, and Staff on UW-owned computers. There is also a corresponding introductory tutorial for using LayoutEditor.
If you have no local CAD options available, and for whatever reason decide the freeware above is not for you, it is possible to use some CAD packages on the EBEAM data processing computer. Talk to me for help with this.
Regardless of the CAD package and data format you choose, for the best results, you should be aware of some ebeam design issues BEFORE you start designing.