SCHD Compiler


As described here, once you have created a set of .SDF and one or more .JDF files, you must compile those files into a single magazine (.mgn) file. The compilation must take place on the ebeam system itself, because the compiler needs access to:
  • All SDF and JDF files in your job set
  • Any JDI (dose include files, used with proximity correction)
  • All pattern files in your job file
  • Machine calibration details for each EOS condition file in your job
  • System-defined calibration and cyclic procedure definitions for each different PATH used in your jobfile.


To compile a job set, open a terminal window on the jbx6300 computer itself, and change the current directory to your job directory which is likely one of these directories or a subdirectory of one of these directories:

job/uw/...
job/outside/....

The full specification for these is: /home/eb0/jeoleb/job/uw
but the home login directory for the jeol user account is /home/eb0/jeoleb

In absolute terms, this can be unambiguously specified as: cd ~/job/uw
(but you should probably know enough unix to understand this already.)

If your sdf file is named: EB204.sdf
you compile this file with the command: schd EB204.sdf

Here's a sample output from a compilation:


bash-3.00$ schd EB204.sdf

schd Ver 5.000 (2009 12/08)                Copyright (c) 1998, 2009 JEOL Ltd.
Schedule Compiler (model:6300)  [RangeID:6300FS]

Start compiling EB204.sdf at 23-JUL-2011 21:28:10 

AUTO CALIB menu file: ~jeoleb/eb/prm/calib.men 

Jobdeck compile start ----
  EB204.jdf                       at 23-JUL-2011 21:28:10 
Jobdeck compile complete ----- 
 
Magazine file creation start ----- 
  SEQ    #   %   Jobname   Layer  Exp Chips  EOS    calibration condition 
[    1][ 1][2B][EB204     ][   1][      628][ 3 ][2nA_A5_M3                  ]
Magazine file creation complete ----- 
 
Magazine file: EB204.mgn         
 
Completion time: 23-JUL-2011 21:28:11 
Elapsed time: Actual time: 00:00:00.28,  CPU working time: 00:00:00.03 
bash-3.00$


This is a simple file with just one sequence. In this case, no error messages occurred, and a .mgn file was created.

If there are error messages, you have to figure out what is wrong and correct it. Sometimes it's simple like a mis-typed pattern file name. Other times, it's a more complicated interaction between commands such as a dose that too low for the conditions specified. Some of the error messages clearly point to the error, in other cases, the messages are unclear and not specific. Ask if you're stumped, and I'll try to help.

Once you have a .mgn file created, you can then view the layout of that file with the ACHK program, which is found on the ANALYSIS desktop.