Job File Examples
Here are several examples of schedule and job files, which you can use for reference. It would be very unusual to actually create a new .sdf or .jdf file “from scratch”; instead, you will almost always start with a file which is at least vaguely similar to what you hope to do, and then modify those sections needing changes. When you are ready to dig in to creating your own job files, probably best to talk with me and I can likely provide you with a file at least close to what you’re looking for that you can use as a starting template for your own file.
Example 1 - A simple chip with three different patterns, in two arrays
Task: Write a chip with two different die, plus a test die.
Demonstrates:
- Simple arrays
- Pattern assignment to specific array locations
- OFFSET for small chip writing.
Example 2 - A wafer of chips for etch process development
Task: Write a wafer of identical square chips, with each chip containing 5 pattern placements of 3 different patterns, with some dose variations.
Demonstrates:
- A sub-array to place multiple patterns at each site of a main array
- Different dose assignments to some sub-array patterns
- Use of virtual chip marks for height measurement