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Job File Storage & Transfer

Directories Where Job Files Are Stored

The JEOL EBX software is relatively flexible with where job files are stored, but we still need to have an organized system. The hierarchy for job files mirrors that setup for pattern files, with the difference that individual research groups and companies have separate subdirectories within their respective main directories (which the pattern system really doesn't allow).

Specifically, job files (.jdf, .sdf, .jdi, & .mgn) should be in one of these directories, or a subdirectory beneath:

/home/eb0/jeoleb/job/uw/...
/home/eb0/jeoleb/job/outside/...

(Note again that the login directory for the jeoleb user is: /home/eb0/jeoleb. So when you login, you start moving relative to this directory.)

Whatever directory you store your jobfiles in, you'll have to navigate there in:

• The text editor you use to edit your jobfiles
• The terminal window where you compile your jobfiles with SCHD
• ACHK, when you want to view your layout
• EXPOSE, when you're actually starting the exposure.

File Names for Job Files

Like the directories, somewhat more relaxed than the limitations for pattern file names, but still, I'd strongly recommend you establish and keep to a structured system of filenames. For my work, I just number ebeam jobs sequentially; this works for me. For sure, avoid filenames like "FinalTest" or "Exposure", because you will inevitably get confused about which file was used for which wafer. To keep history, I always increment the number whenever I change a file, so I can always look back and see exactly which job was run on a certain wafer.

Transferring Job Files

The utility: ebsend is useful for transferring job files (.jdf, .sdf, and .jdi) files from ebeam to jbx6300.
Personally, though I'd recommend you edit your files on the jbx6300 computer, where you have access to ACHK. If you choose to edit your files remotely, you do have to take some care to get the right line endings when transferring between platforms. Most Windows systems use CR+LF for end of line, while Unix and some Mac programs use just LF, which other Mac programs use just CR. You get this wrong, and you get a mess, but most file transfer protocols let you set line ending translation.