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MARKS

In order to re-use your mark definitions later, you should save them using the locally-written MARKS utility.

NOTE:
MARKS is a locally-written utility routine, and is not supported or recognized by JEOL. While it has been used extensively, I recommend you keep good notes of your useful mark parameter settings if needed for reference.

HISTORY:
The JBX software will store all mark parameters in the condition file, but since we use common condition files, your mark parameters would be over-written by other users who use the same condition file. Saving separate condition files isn't practical for several other good reasons, so we have this little utility to separately save and restore specifically your mark parameters for a specific type and configuration of alignment marks.

MARKS is a command-line utility, so to use it, you need to be in a terminal window; typically from the JOBS workspace. There are three possible sub-command within MARKS:

• SAVE
• LIST
• LOAD

Saving Mark Definitions

Once you have a working set of mark parameters you want to save, from any terminal window, type:

marks save {filename}

If you do not give a filename, you will be prompted for one. For identification, start your marks filename with your name or initials, and use only characters acceptable in Solaris directory names (I stick to letters, numerals, and underscores.)

This will save all parameters for these modules, as they are defined at the time you do the SAVE command:

• CHIPAL
• SETWFR
• HEIMAP
• MDRG
• AGCRG
• DRIFT

Listing Mark Definitions

To see a list of available mark definitions, use the command:

marks list

You will see a list such as:

bash-3.00$ marks list
ATLAS2                             ['3.2nA_A5_M3', '3.8nA_A7_M3']
EGK_Ti_on__SiN                     ['6.500pA_A3_M6']
N30                                ['3.2nA_A5_M3']
NT29                               ['3.2nA_A5_M3']
apw_nbjj_v5_t1                     ['6.500pA_A3_M6']
cr_mask_1                          ['3.2nA_A5_M3']
jasonPdMarks2                      ['3.8nA_A7_M3']
jasonPdMarks3                      ['3.8nA_A7_M3']
jasonross1                         ['3.8nA_A7_M3']
mo_on_deep_soi_1                   ['3.8nA_A7_M3']
sipho_v4_201307_SetA               ['3.2nA_A5_M3']
sipho_v4_201307_SetB               ['3.8nA_A7_M3']
sipho_v4_201312_SetC               ['3.8nA_A7_M3']

Note that saved MARK sets are specific that just one condition file, and cannot be copied between conditions at this point.

Loading Mark Definitions

In future e-beam writing sessions, you can re-load previously defined mark sets with the subcommand:

marks load {filename}

If you do not give a filename, you will be prompted for one. For identification, start your marks filename with your name or initials, and use only characters acceptable in Solaris directory names (I stick to letters, numerals, and underscores.)

Note that you must load a mark set AFTER you have done any EOSSET changes -- running EOSSET will load mark parameters from the last saved condition file, not from your own set.