E-Beam Sample Holders at UW



The sample holders for the JEOL Ebeam are very specialized mechanical clamping devices, designed to ensure samples are held securely, flat, level, at the focal-height of the system, and with an electrical connection to ground. The holders are all designed so that the sample is "Front Face Referenced", meaning the substrate is loaded and clamped from behind, with the front surface resting against, precision surfaces built to be exactly at the system's focal height.


Standard Substrate Holders:


  • 2” (50 mm) diameter round wafer
  • 3” (75 mm) diameter round wafer
  • 4” (100 mm) diameter round wafer
  • 6” (150 mm) diameter round wafer
  • 5” (125 mm) square mask plate

CHIP W: UW Small Piece Holder -- UW Style:


More details on Small Piece Holder: Chip-W
  • Wafer: 2" / 50 mm diameter wafer
  • Chip: Window Size: 8 mm, Sample Size: 10 mm height, up to 40 mm width
  • Chip: Window Size: 13 mm, Sample Size: 15 mm height, up to 40 mm width
  • Chip: Window Size: 23 mm, Sample Size: 25 mm height, up to 40 mm width

CHIP C: JEOL Small Piece Holder - C-Style:


More details on Small Piece Holder: Chip-C
  • 2 windows have top-loading chip carriers for chips ~5-~15 mm, clamped and referenced by left and top edges.
  • 2 windows can have any of 7 available inserts with different slot-widths:
    • Window Size: 7.5 mm by 48 mm
    • Window Size: 10 mm by 47 mm
    • Window Size: 12.5 mm by 47 mm
    • Window Size: 15 mm by 46 mm
    • Window Size: 20 mm by 45 mm
    • Window Size: 25 mm by 42 mm
    • Window Size: 35 mm by 35 mm

CHIP S: JEOL Small Piece Holder -- S-Style:


More details on Small Piece Holder -- S-Style
  • Trapezoidal slot opening: 2.5 to 5 mm
  • Trapezoidal slot opening: 6 mm to 16 mm


CHIP 25: For 25 mm square pieces


More details on the Chip 25 holder
  • Up to 3 square chips, 23.5 - 26.5 mm.


Wafer Holder, front view:





25 mm Chip Holder, front view: