Calculators
I’ve created a few calculators here to help you do some simple dose calculations.
Caution - I can't guarantee results are always correct. I’m using these and so far haven’t found any errors, but you might wish to double-check any results, and let me know if there are any problems!
Compute Area Exposure Dose, given an EOS Mode, Beam Current, Shot Pitch, and Exposure Clock
Compute Exposure Clock Rate, given an EOS Mode, Beam Current, Shot Pitch, and Area Exposure Dose,
Compute Minimum Area Exposure Dose possible, given an EOS Mode, Beam Current, and Shot Pitch
Compute Minimum Shot Pitch possible, given an EOS Mode, Beam Current, and Minimum Dose needed
Dose From MODULAT, given a Base Dose and MODULAT value, computes actual Dose.
MODULAT from Actual Dose, given a Base Dose and a desired Actual Dose, computes MODULAT value to use.
Run Time Estimator. Computes a simple estimate of run time for a simple job. Be sure to read and understand the limitations section on the page before using any output from this page.
Die Per Wafer. I didn't write this one, I downloaded it, but it calculates how many die you can fit on a circular wafer, and you can figure out which layout configuration will give you the most full die on a wafer (although it always uses purely rectilinear layout, ie, easiest for dicing or cleaving.)
Prealignment. Input measured X-Y coordinate positions from the Pre-Alignment Microscope, this calculator predicts the JBX Stage and Substrate coordinates corresponding to near the same position.