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Coordinate Modes

These diagrams illustrate the sign conventions of the various coordinate specifications in machine operation and job deck setup.

Stage Coordinates
Refers to absolute stage position, as defined by the system itself. While not commonly used directly by system users, Stage Coordinates can be found mostly within the STAGE module, but also sometimes in other modules that refer to stage positions, such as CALIB modules using positions of alignment marks such as SETWFR or CHIPAL (although it's more common to use Substrate coordinates in those modules as well). Stage Coordinates are always positive values, with the origin defined by the system itself when the stage is re-homed, in the upper-left-most possible stage position, with positive Y increasing downward.

Substrate Coordinates
Position relative to the center of the substrate and window (if using a multi-piece holder). You must define the correct substrate size in the STAGE module, as well as in any CALIB module, and within any Job Deck file that refers to Substrate positions. The origin of Substrate Coordinates is at the the center of the substrate, with Positive Y increasing upwards(!).

Any OFFSET values specified in an SDF file will shift the origin of all Substrate Coordinates in that job, with positive X offsets moving the origin to the right, and positive Y offsets moving the origin upward.

Positions of global alignment marks given in GLMPOS or within the SETWFR module are given in substrate coordinates.

The starting position of an ARRAY definition is given in Substrate coordinates, so positive Y increases upwards.

Array Coordinates
Used within defined ARRAYs. X and Y indices, that is Column and Row indices, increase to the right and downward, so the top row is Row # 1, Row # 2 is below that, etc.

Chip Coordinates
Used within chip definitions (CHMPOS) to give the locations of chip alignment marks relative to a chip origin, which will also be the center of the pattern written for that chip (if no pattern offset is specified on the P(#) definition). Positive Y increases upwards.