Installation
Jun 16, 2010 06:34 AM
System installation is proceeding on schedule, and so far, all sub-systems tested are working well. There isn’t much exciting news or images to show just yet, but for the fact-starved:
- Vacuum levels in the various system components are excellent, with pressure in the electron gun chamber about 1E-10 Torr.
- Stage mechanical checks show the runout performance about 3X below specifications.
- Initial temperature matching results show the exposure chamber interior matched to the room temperature to within 0.06 C, although very small adjustments are still being made to bring this even closer.
- Initial electron source brightness appears excellent.
- We expect first wafer exposures within the next few days.